| US 7,446,926 B2 | ||
| System and method of providing a regenerating protective coating in a MEMS device | ||
| Jeffrey B. Sampsell, San Jose, Calif. (US) | ||
| Assigned to IDC, LLC, Pleasanton, Calif. (US) | ||
| Filed on May 20, 2005, as Appl. No. 11/134,028. | ||
| Claims priority of provisional application 60/613564, filed on Sep. 27, 2004. | ||
| Prior Publication US 2006/0077150 A1, Apr. 13, 2006 | ||
| Int. Cl. G02B 26/00 (2006.01) | ||
| U.S. Cl. 359—290 [359/291; 359/298; 348/770; 348/771; 345/85; 345/108] | 31 Claims |
| 1. An interferometric light modulating device, comprising:
a transparent substrate;
an interferometric modulator array disposed on said transparent substrate, wherein said array comprises a transmissive layer
and a reflective layer;
a protective coating disposed between at least a portion of said transmissive layer and said reflective layer; and
a heater configured to increase the temperature of said protective coating.
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