| US 7,444,863 B2 | ||
| Thermal mass flowmeter | ||
| Masumi Sakai, Kyoto (Japan) | ||
| Assigned to Shimadzu Corporation, Kyoto-fu (Japan) | ||
| Filed on Dec. 19, 2007, as Appl. No. 11/959,586. | ||
| Claims priority of application No. 2006-346953 (JP), filed on Dec. 25, 2006. | ||
| Prior Publication US 2008/0148841 A1, Jun. 26, 2008 | ||
| Int. Cl. G01F 1/68 (2006.01) | ||
| U.S. Cl. 73—204.27 | 2 Claims |

| 1. A thermal mass flowmeter comprising:
a heating unit disposed on an outer peripheral surface of a capillary tube for allowing a fluid to flow therethrough, said
heating unit adapted to locally heat the fluid in said capillary tube through a wall of said capillary tube;
a pair of upstream-side and downstream-side temperature-sensing units each provided as a separate component from said heating
unit, said upstream-side and downstream-side temperature-sensing units being disposed on the outer peripheral surface of said
capillary tube on a same side as that of said heating unit and at respective positions equally distant from said heating unit
toward an upstream side and a downstream side of said capillary tube; and
a calculation section for calculating a flow rate of the fluid flowing through said capillary tube, based on a difference
between respective sensed temperatures of said upstream-side and downstream-side temperature-sensing units,
wherein each of said upstream-side and downstream-side temperature-sensing units includes a thermistor or a resistance temperature
sensor which serves as a temperature-sensing element, and a protective resin covering said thermistor or said resistance temperature
sensor,
said thermistor or said resistance temperature sensor being surrounded by said protective resin covering such that a first
portion of said protective resin covering is sandwiched between said thermistor or said resistance temperature sensor and
said wall of said capillary tube and a second portion of said protective resin covering is provided such that said thermistor
or said resistance temperature sensor is sandwiched between the first portion and said second portion,
wherein a distance between a center of said thermistor or said resistance temperature sensor and an outer surface of said
first portion that contacts said capillary tube is less than a distance between the center of said thermistor or said resistance
temperature sensor and an outer surface of said second potion that is distal from said thermistor or said resistance temperature
sensor.
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