US 7,612,891 B2
Measurement of thin films using fourier amplitude
Der-Shen Wan, Tucson, Ariz. (US)
Assigned to Veeco Instruments, Inc., Tucson, Ariz. (US)
Filed on Dec. 15, 2005, as Appl. No. 11/300,945.
Prior Publication US 2007/0139656 A1, Jun. 21, 2007
Int. Cl. G01B 11/02 (2006.01)
U.S. Cl. 356—503 22 Claims
OG exemplary drawing
 
1. A method for determining a property of a thin film placed over a substrate, comprising the following steps:
producing a test correlogram of said thin film over the substrate;
generating a test linear transform of the test correlogram and extracting a test transform amplitude from the test linear transform;
deriving a test-beam amplitude component of said test transform amplitude by removing a reference amplitude function, wherein the reference amplitude function comprises the product of the amplitude components contributed by the light source and the reference beam; and
finding a value of said property of the thin film by comparing said test-beam amplitude component to a model test-beam amplitude function.