| US 7,612,488 B1 | ||
| Method to control BAW resonator top electrode edge during patterning | ||
| Guillaume Bouche, Portland, Oreg. (US); and Ralph N. Wall, Beaverton, Oreg. (US) | ||
| Assigned to Maxim Integrated Products, Inc., Sunnyvale, Calif. (US) | ||
| Filed on Jan. 16, 2007, as Appl. No. 11/654,244. | ||
| Int. Cl. H01L 41/06 (2006.01) | ||
| U.S. Cl. 310—364 [310/320; 310/365] | 28 Claims |
| 1. A piezoelectric resonator comprising:
a. a bottom electrode;
b. a piezoelectric layer coupled to the bottom electrode;
c. a top electrode coupled to the piezoelectric layer, wherein the top electrode comprises a bottom metal layer and a top
metal layer configured such that an entire perimeter side surface of the top metal layer is recessed relative to a perimeter
edge of the bottom metal layer; and
d. a passivation layer coupled to the top electrode such that the top metal layer and the bottom metal layer are isolated
from a subsequent metal etch step.
|