| US 7,612,337 B2 | ||
| Focused ion beam system and a method of sample preparation and observation | ||
| Yuya Suzuki, Hitachinaka (Japan); Takeo Kamino, Hitachinaka (Japan); Toshie Yaguchi, Omitama (Japan); Mitsuru Konno, Hitachinaka (Japan); and Tsuyoshi Ohnishi, Hitachinaka (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Jan. 18, 2007, as Appl. No. 11/654,685. | ||
| Claims priority of application No. 2006-035507 (JP), filed on Feb. 13, 2006. | ||
| Prior Publication US 2007/0187597 A1, Aug. 16, 2007 | ||
| Int. Cl. H01J 37/26 (2006.01); G01N 23/22 (2006.01) | ||
| U.S. Cl. 250—310 [250/306; 250/307; 250/309; 250/311; 250/492.2; 250/492.21; 250/492.22; 250/492.3] | 10 Claims |
| 1. A focused ion beam system comprising:
an ion beam source which generates an ion beam;
a detector for obtaining surface structure information and either internal structure information or internal composition information
about a sample based on the result of scanning the sample with an electron beam, wherein each information is obtained from
the same field of view as a processing region which is set on the sample based on a secondary electron image obtained by scanning
ion excitation of the sample; and
a processor for generating an image in which the surface structure information and internal structure information or internal
composition information that is acquired of the sample are superposed,
wherein then a processing position of the sample is set based on the superposed image and the sample is processed using a
focused ion beam, and
wherein the detector detects a secondary electron image based on scanning electron or scanning ion excitation and wherein
the internal structure information or internal composition information about the sample is obtained using at least one of
an energy dispersive X-ray spectroscope (EDX), an electron energy loss spectroscope (EELS) and a transmission electron detector,
as the detector.
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