US 7,612,321 B2
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
Chun-Cheng Tsao, Cupertino, Calif. (US)
Assigned to DCG Systems, Inc., Fremont, Calif. (US)
Filed on Sep. 08, 2005, as Appl. No. 11/222,932.
Application 11/222932 is a continuation in part of application No. 10/964157, filed on Oct. 12, 2004, granted, now 7,439,168.
Prior Publication US 2006/0076503 A1, Apr. 13, 2006
Int. Cl. G01J 1/42 (2006.01)
U.S. Cl. 250—208.3  [250/396 R; 356/369; 356/493; 356/507] 16 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a column charged particle beam tool;
a laser source;
a beam splitter optically coupled with the laser source;
a quarter-waveplate optically coupled with the laser source;
a photo-detector optically coupled with the beam splitter;
a frame grabber electrically coupled with the photo-detector;
at least one scan mirror optically coupled with the beam splitter;
a scanning lens optically coupled with the at least one scan mirror and an objective lens;
at least one beam scanner configured to move the at least one scan mirror to alter an optical path of light from the laser source through an optical port in the column of the column charged particle beam tool and scan the light over an area of a sample; and
a scanning controller electrically coupled with the at least one beam scanner, the scanning controller configured to control the movement of the at least one scan mirror via the at least one beam scanner.