US 7,603,785 B2
Air bearing assembly for guiding motion of optical components of a laser processing system
Mark T. Kosmowski, Beaverton, Oreg. (US)
Assigned to Electro Scientific Industries, Inc., Portland, Oreg. (US)
Filed on Feb. 20, 2007, as Appl. No. 11/676,945.
Prior Publication US 2008/0198485 A1, Aug. 21, 2008
Int. Cl. G01B 11/27 (2006.01)
U.S. Cl. 33—286  [33/DIG. 21] 7 Claims
OG exemplary drawing
 
1. In a laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support, the lens forming a focal region of the laser beam and the support operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface, the improvement comprising:
an air bearing assembly including an air bushing that contains the lens and guides its movement along the beam axis in response to a motive force applied to the lens to adjust the focal region of the laser beam relative to the work surface.