| US 7,602,102 B1 | ||
| Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling | ||
| Bradley P. Barber, Acton, Mass. (US); Frank Bi, Shrewsbury, Mass. (US); and Craig E. Carpenter, Shirley, Mass. (US) | ||
| Assigned to Skyworks Solutions, Inc., Woburn, Mass. (US) | ||
| Filed on Apr. 24, 2008, as Appl. No. 12/150,240. | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—320 [310/321; 310/364] | 20 Claims |
| 1. A bulk acoustic wave (BAW) resonator comprising:
a piezoelectric layer situated between upper and lower electrodes, said upper and lower electrodes each comprising a high
density metal;
a controlled thickness region comprising a low density metal segment, said low density metal segment being situated adjacent
to said piezoelectric layer;
wherein said controlled thickness region has a controlled electromechanical coupling.
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