| US 7,602,091 B2 | ||
| Positioning apparatus and exposure apparatus | ||
| Mitsuo Nishimura, Kawasaki (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Feb. 18, 2005, as Appl. No. 11/60,302. | ||
| Claims priority of application No. 2004-049938 (JP), filed on Feb. 25, 2004. | ||
| Prior Publication US 2005/0186064 A1, Aug. 25, 2005 | ||
| Int. Cl. H02K 7/09 (2006.01) | ||
| U.S. Cl. 310—90.5 [310/12] | 16 Claims |
| 1. A positioning apparatus comprising:
a beam which is driven in a first direction that is perpendicular to a longitudinal direction of the beam;
a movable member which surrounds at least a part of the beam and moves with the beam moving in the first direction;
an actuator, which generates a force in the first direction between the beam and the movable member, to control a positional
relationship in the first direction between the beam and the movable member; and
a position regulator, including a bearing that is arranged between the beam and the movable member, and configured to regulate
a positional relationship in the first direction between the beam and the movable member,
wherein the movable member is further driven along the longitudinal direction of the beam, and the bearing has an outer ring,
which can rotate about an axis perpendicular to a plane that is parallel to the first direction and the longitudinal direction.
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