| US 7,601,974 B2 | ||
| Charged particle beam apparatus | ||
| Hiroaki Mito, Hitachinaka (Japan); Katsuhiro Sasada, Hitachinaka (Japan); Kazuo Kato, Naka (Japan); Tomohiro Kudo, Hitachinaka (Japan); Tomonori Saeki, Yokosuka (Japan); Yasuo Yahagi, Tokyo (Japan); and Masayuki Kobayashi, Fujisawa (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Apr. 17, 2007, as Appl. No. 11/785,433. | ||
| Application 11/785433 is a continuation of application No. 11/305231, filed on Dec. 19, 2005, granted, now 7,205,541. | ||
| Claims priority of application No. 2005-336461 (JP), filed on Nov. 22, 2005. | ||
| Prior Publication US 2007/0187601 A1, Aug. 16, 2007 | ||
| Int. Cl. A61N 5/00 (2006.01) | ||
| U.S. Cl. 250—492.1 [250/492.2] | 13 Claims |
| 1. A charged particle beam apparatus comprising:
a charged particle beam for irradiating a sample;
a detector for detecting charged particles released from the sample;
a vacuum chamber that surrounds the sample; and
a detection apparatus which detects one or more substances selected from the group consisting of aliphatic hydrocarbon-based
substances, phthalate substances, perfluoropolyether-based substances inside the vacuum chamber, and a component included
in a lubricant used inside the vacuum chamber;
wherein the detection apparatus includes a spectrophotometer.
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