US 7,601,957 B2
Electron microscope and combined illumination lens
Hisamitsu Endoh, Kusatsu (Japan); Masato Achihara, Suita (Japan); Katsushige Tsuno, Akisima (Japan); and Tetsuo Oikawa, Tokyo (Japan)
Assigned to National University Corporation Kyoto Institute of Technology, Kyoto (Japan)
Appl. No. 11/884,765
PCT Filed Feb. 17, 2006, PCT No. PCT/JP2006/302884
§ 371(c)(1), (2), (4) Date Jan. 16, 2008,
PCT Pub. No. WO2006/088159, PCT Pub. Date Aug. 24, 2006.
Claims priority of application No. 2005-044190 (JP), filed on Feb. 21, 2005.
Prior Publication US 2008/0149833 A1, Jun. 26, 2008
Int. Cl. G01N 23/00 (2006.01); G21K 7/00 (2006.01)
U.S. Cl. 250—311  [250/310; 250/306; 250/307; 250/442.11; 250/396 ML; 359/9; 359/29; 359/32; 359/1; 359/2; 359/3; 359/7; 359/15; 356/489; 356/457; 356/484] 23 Claims
OG exemplary drawing
 
1. An electron microscope comprising:
an electron source generating an electron beam;
a condenser lens converging the electron beam supplied from the electron source at a predetermined distance;
an electron beam split means splitting the electron beam supplied from the condenser lens into first and second electron beams;
a combined illumination lens providing separately the first and second electron beams with lens actions;
a sample hold means holding a sample so that the sample is illuminated with the first electron beam affected by the lens action of the combined illumination lens;
a detection means detecting a Fourier transform electron beam hologram formed by interference of the first electron beam illuminating the sample with the second electron beam not illuminating the sample;
a computing means conducting a predetermined operation on the electron beam hologram supplied from the detection means; and
a display means displaying information of the sample supplied from the computing means.