| US 7,601,296 B2 | ||
| Powder metallurgy sputtering targets and methods of producing same | ||
| Christopher A. Michaluk, Gilbertsville, Pa. (US); Shi Yuan, West Chester, Pa. (US); and James Maguire, Norristown, Pa. (US) | ||
| Assigned to Cabot Corporation, Boston, Mass. (US) | ||
| Filed on May 10, 2006, as Appl. No. 11/431,259. | ||
| Application 11/431259 is a division of application No. 10/752270, filed on Jan. 06, 2004, granted, now 7,067,197. | ||
| Claims priority of provisional application 60/438465, filed on Jan. 07, 2003. | ||
| Prior Publication US 2006/0201583 A1, Sep. 14, 2006 | ||
| Int. Cl. B22F 1/00 (2006.01) | ||
| U.S. Cl. 419—30 [419/48; 419/49; 419/67; 148/237; 148/238; 75/244; 421/551; 421/559] | 17 Claims |
| 1. A method for forming a powder metallurgy article, comprising:
surface-nitriding a deoxidized metal powder to form a surface-nitrided metal powder having an oxygen content of about 300
ppm or less and having a nitrogen content of at least about 10 ppm;
consolidating said surface-nitrided metal powder by a powder metallurgy technique to form a metallurgical article; and
wherein said formed metallurgical article comprises a sputtering target.
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