| US 7,601,270 B1 | ||
| Microfabricated elastomeric valve and pump systems | ||
| Marc A. Unger, South San Francisco, Calif. (US); Hou-Pu Chou, Pasadena, Calif. (US); Todd A. Thorsen, Pasadena, Calif. (US); Axel Scherer, Laguna Beach, Calif. (US); and Stephen R. Quake, San Marino, Calif. (US) | ||
| Assigned to California Institute of Technology, Pasadena, Calif. (US) | ||
| Filed on Jun. 27, 2000, as Appl. No. 9/605,520. | ||
| Claims priority of provisional application 60/141503, filed on Jun. 28, 1999. | ||
| Claims priority of provisional application 60/147199, filed on Aug. 03, 1999. | ||
| Claims priority of provisional application 60/186856, filed on Mar. 03, 2000. | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. B29C 51/00 (2006.01) | ||
| U.S. Cl. 216—22 [216/33; 216/52; 264/239] | 82 Claims |
| 1. A method of microfabricating an elastomeric structure, comprising:
microfabricating a first elastomeric layer having a recess formed therein that forms a flow channel, and a deflectable membrane
formed integral with the first elastomeric layer, wherein the flow channel and deflectable membrane are formed from a single
piece of elastomeric material;
microfabricating a second elastomeric layer having a recess formed therein, wherein the deflectable membrane is deflected
to close the flow channel in response to an actuation force from the recess in the second elastomeric layer;
positioning the second elastomeric layer on top of the first elastomeric layer; and,
bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer.
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