| US 7,600,533 B2 | ||
| Microfluidic valve having free-floating member and method of fabrication | ||
| Yu-Chong Tai, Pasadena, Calif. (US); Po-Jui Chen, Pasadena, Calif. (US); Damien C. Rodger, Los Angeles, Calif. (US); and Mark S. Humayun, Glendale, Calif. (US) | ||
| Assigned to California Institute of Technology, Pasadena, Calif. (US) | ||
| Filed on Aug. 10, 2007, as Appl. No. 11/837,450. | ||
| Claims priority of provisional application 60/836883, filed on Aug. 10, 2006. | ||
| Prior Publication US 2008/0035875 A1, Feb. 14, 2008 | ||
| Int. Cl. F16K 15/14 (2006.01) | ||
| U.S. Cl. 137—516.25 [137/533.19; 137/859] | 23 Claims |
| 1. A micro check valve for controlling flow of a fluid, comprising:
a multi-level valve seat comprised of a substrate material, the multi-level valve seat having a first surface at a first level
and a second surface at a second, lower level;
a valve cap disposed on the first surface, a space being defined between the valve seat and the valve cap; and
a floating member movable in the space between the multi-level valve seat and the valve cap by application of pressure on
the floating member by a fluid to passively control flow of the fluid through the multi-level valve seat and the valve cap,
wherein the multi-level valve seat, the valve cap and the floating member are configured to permit flow of the fluid when
the fluid pressure is between a threshold pressure and a cut-off pressure and to stop flow of the fluid when the fluid pressure
exceeds the cut-off pressure.
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