| US 7,432,681 B2 | ||
| Scanner system | ||
| Souichi Toyama, Ebina (Japan); Haruaki Otsuki, Tsuchiura (Japan); Atsushi Sakamoto, Tsuchiura (Japan); Kenta Seki, Tsuchiura (Japan); and Yaichi Okubo, Ebina (Japan) | ||
| Assigned to Hitachi Via Mechanics, Ltd., Ebina-shi (Japan) | ||
| Filed on Aug. 27, 2004, as Appl. No. 10/927,082. | ||
| Claims priority of application No. 2003-415247 (JP), filed on Dec. 12, 2003. | ||
| Prior Publication US 2005/0128553 A1, Jun. 16, 2005 | ||
| Int. Cl. G05B 11/42 (2006.01) | ||
| U.S. Cl. 318—610 [318/609; 318/560; 318/621; 700/14; 700/41; 700/45; 700/58; 700/59; 700/42; 700/43] | 4 Claims |
| 1. A scanner system comprising:
a mirror supported on a rotating shaft; and
a servo control unit comprising:
an integral compensating unit for detecting a rotation angle of said rotating shaft, receiving a commanded value from an upper
control unit through a trajectory generator, calculating an error by subtracting said detected angular value from said commanded
value, and integrating said error;
a detected value proportional compensating unit for proportional compensating said detected angular value; and
a detected value differential compensating unit for differential compensating said detected angular value so as to position
the mirror; wherein
said scanner system comprises;
a tracking error proportional compensating unit for calculating a correction value proportional to said error, and;
an add unit for adding an output of said tracking error proportional compensating unit to an output of said integral compensating
unit.
|