US 7,432,202 B2
Method of substrate manufacture that decreases the package resistance
Bijay S. Saha, Chandler, Ariz. (US); Munehiro Toyama, Ibarakiken (Japan); Ehab A. Nasir, Mesa, Ariz. (US); Omar J. Bchir, Chandler, Ariz. (US); and Charavana K. Gurumurthy, Gilbert, Ariz. (US)
Assigned to Intel Corporation, Santa Clara, Calif. (US)
Filed on Dec. 28, 2005, as Appl. No. 11/320,273.
Prior Publication US 2007/0148971 A1, Jun. 28, 2007
Int. Cl. H01L 21/44 (2006.01)
U.S. Cl. 438—686  [257/768] 13 Claims
OG exemplary drawing
 
1. A method comprising:
forming a coating on a land contact of a package substrate configured to connect to a circuit die, the land contact comprising copper, the coating comprising a first material disposed between a first layer and a second layer, and each of the first layer and the second layer being made of a second material comprising gold.