| US 7,430,918 B2 | ||
| Amplified flow through pressure sensor | ||
| Thirumani A. Selvan, Bangalore (India); and Saravanan Sadasivan, Bangalore (India) | ||
| Assigned to Honeywell International Inc., Morristown, N.J. (US) | ||
| Filed on Dec. 04, 2006, as Appl. No. 11/633,692. | ||
| Prior Publication US 2008/0127741 A1, Jun. 05, 2008 | ||
| Int. Cl. G01L 9/06 (2006.01) | ||
| U.S. Cl. 73—721 [73/727] | 20 Claims |
| 1. A MEMS based pressure sensing system for flow rate measurements, comprising:
a sensor partitioned into a first half and a second half, with a wall member separating said first half and said second half;
a pressure block comprising a sensing diaphragm associated with a piezoresistive material, wherein said sensing diaphragm
deflects when a pressure is applied to said piezoresistive material;
a first signal conditioning unit arranged in said first half of said sensor, wherein said first signal conditioning circuit
comprises an impedance circuit embedded with at least one piezoresistive element associated with said piezoresistive material;
and
a second signal conditioning unit arranged in said second half of said sensor, wherein said second signal conditioning unit
incorporates a signal amplifier, such that said first and second signal conditioning units, said pressure block, said sensing
diaphragm and said sensor provide a MEMS based pressure sensing system for flow rate measurements.
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