| US 7,599,058 B2 | ||
| Methods for plasma diagnostics and the measurement of thin films | ||
| David Craven, Palo Alto, Calif. (US); and Ryan Roberts, Scotts Valley, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Dec. 24, 2007, as Appl. No. 11/963,974. | ||
| Application 11/963974 is a division of application No. 11/016155, filed on Dec. 17, 2004, abandoned. | ||
| Prior Publication US 2008/0158557 A1, Jul. 03, 2008 | ||
| Int. Cl. G01J 3/30 (2006.01) | ||
| U.S. Cl. 356—316 [356/317; 356/326; 356/72] | 17 Claims |
| 1. A method for obtaining data from a spectral source, comprising:
identifying an environment that is capable of generating spectral information;
obtaining the generated spectral information from the environment from one location of the environment;
for the spectral information obtained from the one location, splitting the generated spectral information into a plurality
of spectral data units that are tuned to register particular bands of wavelengths from a visible electromagnetic spectrum,
wherein the splitting the generated spectral information includes rotating a shutter to enable capturing the particular bands
of wavelengths for each of the spectral data units;
capturing the particular bands of wavelengths for each of the spectral data units in separate storage entities;
separately and in parallel processing each of the particular bands of wavelengths of the plurality of spectral data units;
and
combining an output of the processing to produce a complete processing of the particular bands of wavelengths of the plurality
of spectral data units, the complete processing defining a quantification of the environment from the one location.
|