| US 7,599,051 B1 | ||
| Calibration of a substrate inspection tool | ||
| Steven M. Labovitz, Sunnyvale, Calif. (US); and Weston L. Sousa, San Jose, Calif. (US) | ||
| Assigned to KLA-Tencor Technologies Corporation, Milpitas, Calif. (US) | ||
| Filed on Nov. 21, 2006, as Appl. No. 11/562,374. | ||
| Int. Cl. G01N 21/00 (2006.01); G01D 18/00 (2006.01); G06F 17/50 (2006.01) | ||
| U.S. Cl. 356—237.2 [356/237.4; 356/394; 702/85; 703/2] | 39 Claims |
| 1. A method for calibration of a substrate inspection tool, comprising:
using the tool to inspect a standard substrate having simulated contamination defects with known characteristics, wherein
the tool exposes the standard substrate and simulated contamination defects to radiation having a wavelength of about 260
nanometers or less;
determining the simulated contamination defects with the tool by comparing a detected pattern of radiation reflected by the
standard substrate to a predicted pattern or by comparing the detected pattern of radiation transmitted through the standard
substrate and a predicted pattern; and
calibrating the tool against the determined simulated contamination defects;
wherein the simulated contamination defects are stable over time under exposure to radiation having a wavelength of about
260 nanometers or less.
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