| US 7,599,050 B2 | ||
| Surface defect inspecting method and device | ||
| Chie Ishikawa, Ibaraki (Japan); Makoto Iwata, Kawanishi (Japan); Mamoru Sakaue, Mino (Japan); and Keisuke Kuroki, Takarazuka (Japan) | ||
| Assigned to Daihatsu Motor Co., Ltd., Osaka (Japan) | ||
| Appl. No. 10/576,486 PCT Filed Oct. 20, 2004, PCT No. PCT/JP2004/015466 § 371(c)(1), (2), (4) Date Dec. 21, 2006, PCT Pub. No. WO2005/038445, PCT Pub. Date Apr. 28, 2005. |
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| Claims priority of application No. 2003-360584 (JP), filed on Oct. 21, 2003; application No. 2004-105450 (JP), filed on Mar. 31, 2004; application No. 2004-105451 (JP), filed on Mar. 31, 2004; and application No. 2004-105452 (JP), filed on Mar. 31, 2004. | ||
| Prior Publication US 2007/0206182 A1, Sep. 06, 2007 | ||
| Int. Cl. G01N 21/00 (2006.01) | ||
| U.S. Cl. 356—237.2 [356/237.6; 356/603; 356/606] | 11 Claims |
| 1. A surface defect inspecting method comprising the steps of:
irradiating an irradiation light having a predetermined pattern on an inspection target surface;
imaging the surface irradiated with the irradiation light; and
inspecting the inspection target surface based on an obtained image of the inspection target surface,
wherein the irradiation light irradiated from an irradiation face has a mesh-like pattern including meshes of a same shape,
each mesh having an irradiation area smaller than a non-irradiation area in a plane normal to an optical axis; and
the inspection target surface is inspected based on lightness/darkness information of an image area in the obtained image
corresponding to a non-irradiated area in the inspection target surface.
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