| US 7,598,826 B2 | ||
| Piezoelectric thin film device having a drive section with a weighted portion | ||
| Shoichiro Yamaguchi, Ichinomiya (Japan); Yukihisa Osugi, Nagoya (Japan); Tomoyoshi Tai, Nagoya (Japan); and Masahiro Sakai, Nagoya (Japan) | ||
| Assigned to NGK Insulators, Ltd., Nagoya (Japan) | ||
| Filed on Mar. 02, 2007, as Appl. No. 11/681,346. | ||
| Claims priority of application No. 2006-062267 (JP), filed on Mar. 08, 2006; application No. 2006-137280 (JP), filed on May 17, 2006; application No. 2006-192743 (JP), filed on Jul. 13, 2006; and application No. 2006-305037 (JP), filed on Nov. 10, 2006. | ||
| Prior Publication US 2007/0210878 A1, Sep. 13, 2007 | ||
| Int. Cl. H03H 9/13 (2006.01); H03H 9/15 (2006.01); H03H 9/54 (2006.01) | ||
| U.S. Cl. 333—187 [310/312; 333/189] | 9 Claims |
| 1. A piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators, the device comprising:
a piezoelectric thin film; and
electrodes formed on respective main surfaces of said piezoelectric thin film and having drive sections opposed to each other
with said piezoelectric thin film interposed therebetween,
wherein each respective drive section has a slender two-dimensional shape with magnitude in a longitudinal direction being
not less than twice as large as magnitude in a widthwise direction, and
wherein at least one of said drive sections has a weighted portion with a larger mass per unit area than that of a central
portion, only along inner sides of a pair of opposite sides extending in the longitudinal direction.
|