forming a gate on a substrate;

forming a gate insulator layer on the substrate to cover the gate;

forming a semiconductor layer, a conductive layer and a photosensitive black matrix sequentially on the gate insulator layer, wherein the photosensitive black matrix has a color filter containing opening and includes a first portion and a second portion, and wherein a thickness of the first portion is smaller than a thickness of the second portion;

forming a channel, a source and a drain simultaneously on the gate insulator layer over the gate using the photosensitive black matrix as a mask, wherein the gate, the channel, the source and the drain constitute a thin film transistor (TFT);

forming a passivation on the photosensitive black matrix, the TFT and the gate insulator layer;

forming a color filter layer in the color filter containing opening by an inkjet printing process;

forming a dielectric layer on the black matrix and the color filter layer;

patterning the dielectric layer and the passivation to expose the drain; and

forming a pixel electrode electrically connected to the drain.