US 7,596,886 B1
Method and system to separate and recycle divergent chemistries
John M. Boyd, Atascadero, Calif. (US); and Fred C. Redeker, Fremont, Calif. (US)
Assigned to Lam Research Corporation, Fremont, Calif. (US)
Filed on Dec. 18, 2002, as Appl. No. 10/325,556.
Int. Cl. F26B 17/24 (2006.01); B08B 3/04 (2006.01)
U.S. Cl. 34—317  [34/339; 34/357; 34/58; 134/148; 134/153; 134/186; 134/902] 25 Claims
OG exemplary drawing
 
1. An apparatus for collecting fluid within a wafer cleaning chamber, comprising:
a rotatable annular manifold having a body including an inner surface and a bottom surface, the annular manifold configured to support a wafer within a region inside the inner surface, the annular manifold including a channel extending through the body from the inner surface to the bottom surface, the channel defined to be in fluid communication with at least one opening in the bottom surface; and
a catch basin having a base with at least one drain defined therein, the base having an inner sidewall and an outer sidewall extending therefrom, the catch basin being disposed under the annular manifold so as to capture fluid dispensed from the at least one opening of the bottom surface of the annular manifold.