| US 7,595,493 B2 | ||
| Radiation detecting apparatus, manufacturing method thereof, scintillator panel and radiation detecting system | ||
| Satoshi Okada, Kanagawa-ken (Japan); Yoshihiro Ogawa, Tokyo (Japan); Masato Inoue, Saitama-ken (Japan); Kazumi Nagano, Kanagawa-ken (Japan); Shinichi Takeda, Kanagawa-ken (Japan); and Tomoyuki Tamura, Kanagawa-ken (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Aug. 09, 2005, as Appl. No. 11/199,201. | ||
| Claims priority of application No. 2004-233420 (JP), filed on Aug. 10, 2004. | ||
| Prior Publication US 2006/0033040 A1, Feb. 16, 2006 | ||
| Int. Cl. G01T 1/20 (2006.01) | ||
| U.S. Cl. 250—370.11 [250/367] | 19 Claims |
| 1. A radiation detecting apparatus, comprising:
a sensor panel;
a phosphor layer, formed on said sensor panel, which converts radiation into light; and
a phosphor protecting layer covering said phosphor layer to adhere closely to said sensor panel,
wherein said phosphor protecting layer is made of an organic film formed by vapor deposition polymerization,
wherein said sensor panel includes a substrate, a light receiving unit composed of a plurality of photoelectric conversion
elements arranged on said substrate two-dimensionally to convert the light into an electric signal, and a protecting film
provided on said light receiving unit to touch said phosphor layer and said phosphor protecting layer, and
wherein said phosphor protecting layer is made of an organic film formed of two kinds of reactive groups, and obtained by
a polyaddition reaction, said phosphor protecting layer being made of polyurea.
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