US 7,595,481 B2
Scanning optical system measuring device and scanning optical system measuring method
Wataru Watanabe, Shizuoka-ken (Japan); and Takahiro Chikuda, Shizuoka-ken (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan); and Toshiba Tec Kabushiki Kaisha, Tokyo (Japan)
Filed on Aug. 17, 2007, as Appl. No. 11/840,372.
Prior Publication US 2009/0045324 A1, Feb. 19, 2009
Int. Cl. H01J 3/14 (2006.01); G02B 7/04 (2006.01); H04N 1/04 (2006.01)
U.S. Cl. 250—234  [250/201.4; 358/474] 18 Claims
OG exemplary drawing
 
1. A scanning optical system measuring device for making adjustment of a scanning optical system which performs scanning with a light beam, comprising:
plural one-dimensional position detection devices provided at a distance from each other in a scanning direction of a light beam caused to perform scanning, each of the one-dimensional position detection devices having a predetermined length in a one-dimensional direction intersecting the scanning direction of the light beam, each of the one-dimensional position detection devices being configured to output current values from both edges of a corresponding detection device in the one-dimensional direction in response to the scanning of the light beam, a relation between the outputted current values being determined according to a light receiving position of the light beam caused to perform scanning on a corresponding detection device so that the outputted current values indicate the light receiving position; and
a detection signal processing unit configured to detect scanning state of the light beam on the basis of the current values outputted from the one-dimensional position detection devices.