| US 7,595,477 B2 | ||
| Anti- reflective device having an anti-reflection surface formed of silicon spikes with nano-tips | ||
| Youngsman Bae, Gardena, Calif. (US); Sohrab Mooasser, Santa Monica, Calif. (US); Harish Manohara, Arcadia, Calif. (US); Choonsup Lee, Pasadena, Calif. (US); and Kungsam Bae, Gardena, Calif. (US) | ||
| Assigned to California Institute of Technology, Pasadena, Calif. (US) | ||
| Filed on Sep. 07, 2006, as Appl. No. 11/518,537. | ||
| Claims priority of provisional application 60/715375, filed on Sep. 07, 2005. | ||
| Prior Publication US 2009/0108183 A1, Apr. 30, 2009 | ||
| Int. Cl. H01J 3/14 (2006.01) | ||
| U.S. Cl. 250—216 [250/208.1; 250/206.1; 359/229] | 6 Claims |
| 1. An anti-reflective device, comprising:
a silicon substrate having a first side and a second side, the first side having plurality of silicon spikes with nano-tips;
a first metallic layer formed on the silicon spikes, thereby forming an anti-reflection surface;
wherein the silicon spikes are formed to have a high-aspect ratio; and
wherein the silicon spikes are formed on the first side such that an aperture exists on the first side, the aperture extending
from the first side to the second side and being surrounded by silicon spikes on the first side.
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