| US 7,592,255 B2 | ||
| Fabricating arrays of metallic nanostructures | ||
| Philip J Kuekes, Menlo Park, Calif. (US); M. Saif Islam, Sacramento, Calif. (US); Shih-Yuan Wang, Palo Alto, Calif. (US); and Alexandre M. Bratkovski, Mountain View, Calif. (US) | ||
| Assigned to Hewlett-Packard Development Company, L.P., Houston, Tex. (US) | ||
| Filed on Dec. 22, 2004, as Appl. No. 11/21,615. | ||
| Prior Publication US 2006/0131695 A1, Jun. 22, 2006 | ||
| Int. Cl. H01L 21/44 (2006.01) | ||
| U.S. Cl. 438—679 [438/681; 427/249.1; 257/E51.04; 977/712] | 17 Claims |
| 1. A method for fabricating a patterned array of metallic nanostructures, comprising:
catalytically growing a plurality of nanowires on a surface of a substrate, the surface of the substrate comprising a crystalline
material, said plurality of nanowires being laterally arranged on said substrate in a predetermined, periodic, two-dimensional-array
pattern;
coating said plurality of nanowires with a metal to generate a plurality of metal-coated nanowires having vacancies therebetween;
stabilizing said metal-coated nanowires by filling in said vacancies with a sacrificial material;
planarizing said stabilized metal-coated nanowires; and
removing said sacrificial material, said patterned array of metallic nanostructures being formed by said plurality of planarized
metal-coated nanowires.
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