| US 7,591,641 B2 | ||
| Mold and process of production thereof | ||
| Tatsuya Saito, Ebina (Japan); Aya Imada, Yokohama (Japan); and Tohru Den, Tokyo (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Mar. 06, 2006, as Appl. No. 11/367,343. | ||
| Claims priority of application No. 2005-080923 (JP), filed on Mar. 22, 2005. | ||
| Prior Publication US 2006/0216413 A1, Sep. 28, 2006 | ||
| Int. Cl. B29C 59/00 (2006.01); B28B 7/38 (2006.01) | ||
| U.S. Cl. 425—385 [427/133] | 7 Claims |
| 1. A mold for nano-imprinting with a concavo-convex pattern comprising a surface portion,
wherein the surface portion has the concavo-convex pattern and comprises a shape-memory material, and
wherein the shape-memory material is an NiTi alloy composed of Ni and Ti at a ratio of 52:48 atom %.
|