CPC H02N 1/006 (2013.01) [B81B 7/0016 (2013.01); B81B 2203/0136 (2013.01); H04N 23/687 (2023.01)] | 20 Claims |
1. A micromechanical arm array comprising:
a plurality of micromechanical arms spaced from each other in a first horizontal direction and extending in a second horizontal direction, wherein each micromechanical arm comprises a protrusion at a top of each micromechanical arm and protruding upwardly in a vertical direction;
a plurality of protection films, each protection film encapsulating one of the plurality of micromechanical arms; and
a metal connection structure extending in the first horizontal direction and comprising:
a plurality of joint portions, each joint portion corresponding to and surrounding the protrusion of one of the plurality of micromechanical arms; and
a plurality of connection portions extending in the first horizontal direction and connecting two neighboring joint portions.
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