US 11,757,341 B2
Actuator device
Daiki Suzuki, Hamamatsu (JP); Takuma Osaki, Hamamatsu (JP); and Yasuyuki Sakakibara, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Dec. 28, 2022, as Appl. No. 18/90,160.
Application 18/090,160 is a continuation of application No. 17/843,189, filed on Jun. 17, 2022, granted, now 11,581,792.
Application 17/843,189 is a continuation of application No. 16/767,027, granted, now 11,394,284, issued on Jul. 19, 2022, previously published as PCT/JP2018/043412, filed on Nov. 26, 2018.
Claims priority of application No. 2017-232057 (JP), filed on Dec. 1, 2017.
Prior Publication US 2023/0145171 A1, May 11, 2023
Int. Cl. G02B 26/08 (2006.01); H02K 33/02 (2006.01)
CPC H02K 33/02 (2013.01) [G02B 26/085 (2013.01)] 23 Claims
OG exemplary drawing
 
1. An actuator device comprising:
a support part;
a first movable part including a mirror surface;
a second movable part formed in a frame shape and arranged so as to surround the first movable part;
a first connecting part connecting the first movable part to the second movable part so that the first movable part can swing around a first axis;
a second connecting part connecting the second movable part to the support part;
a spiral coil provided to the second movable part;
a magnetic field generator that generates a magnetic field to act on the coil;
a first external terminal provided to the support part; and
a first wiring connected to an inner end portion of the coil and the first external terminal,
wherein the first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring formed in a shape of a layer, provided to the second movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring,
wherein a thickness of the straddle wiring is smaller than a thickness of the coil, and
wherein the straddle wiring is electrically insulated from the minor surface.