CPC H01L 29/267 (2013.01) [H01L 29/408 (2013.01); H01L 29/7787 (2013.01)] | 27 Claims |
1. A layered structure, comprising:
a group III-nitride (III-N) layer, wherein the III-N layer has an orientation that is not polar; and
a polar rare-earth oxide layer grown over the III-N layer,
wherein the orientation of the III-N layer comprises an atomic arrangement such that a portion of rare-earth metal atoms of the polar rare-earth oxide layer are vertically aligned with nitrogen atoms of the III-N layer, and
wherein the orientation of the III-N layer comprises a <1-100> orientation or a <11-20> orientation.
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