US 11,756,888 B2
Semiconductor device having contact plug connected to gate structure on PMOS region
Shih-Cheng Chen, Tainan (TW); Li-Hsuan Ho, Kaohsiung (TW); Tsuo-Wen Lu, Kaohsiung (TW); Shih-Hao Liang, Tainan (TW); Tsung-Hsun Wu, Kaohsiung (TW); Po-Jen Chuang, Kaohsiung (TW); and Chi-Mao Hsu, Tainan (TW)
Assigned to UNITED MICROELECTRONICS CORP., Hsin-Chu (TW)
Filed by UNITED MICROELECTRONICS CORP., Hsin-Chu (TW)
Filed on Oct. 5, 2021, as Appl. No. 17/493,852.
Application 17/493,852 is a continuation of application No. 16/695,028, filed on Nov. 25, 2019, granted, now 11,171,091.
Claims priority of application No. 201911033932.5 (CN), filed on Oct. 28, 2019.
Prior Publication US 2022/0028787 A1, Jan. 27, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 23/535 (2006.01); H01L 21/28 (2006.01); H01L 21/8238 (2006.01); H01L 23/528 (2006.01); H01L 27/092 (2006.01); H01L 29/49 (2006.01); H01L 29/66 (2006.01); H01L 27/02 (2006.01)
CPC H01L 23/535 (2013.01) [H01L 21/28088 (2013.01); H01L 21/82385 (2013.01); H01L 21/823871 (2013.01); H01L 23/528 (2013.01); H01L 27/092 (2013.01); H01L 29/4966 (2013.01); H01L 29/66545 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a substrate having a NMOS region and a PMOS region;
a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate;
a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region;
a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region;
a first contact plug landing on the second source/drain region adjacent to one side of the metal gate;
a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and
a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug, wherein the first contact plug, the second contact plug, and the third contact plug form a straight line extending along the second direction.