US 11,756,799 B1
3D printed ceramic structure with metal traces
Tobias Schaedler, Oak Park, CA (US); Kayleigh Porter, Los Angeles, CA (US); and Phuong Bui, Thousand Oaks, CA (US)
Assigned to HRL LABORATORIES, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Feb. 2, 2021, as Appl. No. 17/165,825.
Claims priority of provisional application 62/970,076, filed on Feb. 4, 2020.
Int. Cl. H01L 23/15 (2006.01); H01L 23/498 (2006.01); H01L 23/13 (2006.01); H01L 21/48 (2006.01)
CPC H01L 21/4807 (2013.01) [H01L 21/4857 (2013.01); H01L 21/4867 (2013.01); H01L 23/15 (2013.01); H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01L 23/13 (2013.01); H01L 23/49866 (2013.01); H01L 23/49883 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An article, comprising:
a monolithic ceramic body extending from a top surface of the article to a bottom surface of the article and composed of a ceramic material; and
a first conductive trace,
the first conductive trace having a first portion entirely within the ceramic material, the first portion having a length of 0.5 mm and transverse dimensions less than 500 microns,
the ceramic material comprising a plurality of ceramic particles in a ceramic matrix, and
wherein the ceramic matrix comprises between 20 at % and 30 at % Si, between 30 at % and 40 at % C, and between 30 at % and 40 at % 0.