CPC H01L 21/4807 (2013.01) [H01L 21/4857 (2013.01); H01L 21/4867 (2013.01); H01L 23/15 (2013.01); H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01L 23/13 (2013.01); H01L 23/49866 (2013.01); H01L 23/49883 (2013.01)] | 22 Claims |
1. An article, comprising:
a monolithic ceramic body extending from a top surface of the article to a bottom surface of the article and composed of a ceramic material; and
a first conductive trace,
the first conductive trace having a first portion entirely within the ceramic material, the first portion having a length of 0.5 mm and transverse dimensions less than 500 microns,
the ceramic material comprising a plurality of ceramic particles in a ceramic matrix, and
wherein the ceramic matrix comprises between 20 at % and 30 at % Si, between 30 at % and 40 at % C, and between 30 at % and 40 at % 0.
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