CPC G03F 7/70758 (2013.01) [G03F 7/70716 (2013.01); H02P 25/064 (2016.02)] | 7 Claims |
1. A control method of a driving apparatus that repeatedly performs a process of driving a target object in a predetermined range by a linear motor, wherein the linear motor includes a stator in which a plurality of coils are arrayed, and a mover provided with the target object, the control method comprising:
changing a position of the stator with respect to the predetermined range at an arbitrary timing; and
determining, in accordance with the changed position of the stator, output ratios of the plurality of coils in the process,
wherein the arbitrary timing includes at least one of:
a timing at which the number of driving operations of the target object reaches a first threshold value;
a timing at which a temperature of the linear motor reaches a second threshold value;
a timing at which an electric characteristic of at least one of the plurality of coils reaches a third threshold value, the electric characteristic including at least one of a resistance value, a voltage value, a current value and an inductance value; and
a timing at which a difference between a measurement value indicating a driving state of the target object and a target value reaches a fourth threshold value, the driving state including at least one of a velocity, an acceleration and a position.
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