US 11,754,932 B2
Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article
Hayato Hoshino, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 1, 2022, as Appl. No. 17/856,018.
Claims priority of application No. 2021-113134 (JP), filed on Jul. 7, 2021.
Prior Publication US 2023/0011753 A1, Jan. 12, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01); H02P 25/064 (2016.01)
CPC G03F 7/70758 (2013.01) [G03F 7/70716 (2013.01); H02P 25/064 (2016.02)] 7 Claims
OG exemplary drawing
 
1. A control method of a driving apparatus that repeatedly performs a process of driving a target object in a predetermined range by a linear motor, wherein the linear motor includes a stator in which a plurality of coils are arrayed, and a mover provided with the target object, the control method comprising:
changing a position of the stator with respect to the predetermined range at an arbitrary timing; and
determining, in accordance with the changed position of the stator, output ratios of the plurality of coils in the process,
wherein the arbitrary timing includes at least one of:
a timing at which the number of driving operations of the target object reaches a first threshold value;
a timing at which a temperature of the linear motor reaches a second threshold value;
a timing at which an electric characteristic of at least one of the plurality of coils reaches a third threshold value, the electric characteristic including at least one of a resistance value, a voltage value, a current value and an inductance value; and
a timing at which a difference between a measurement value indicating a driving state of the target object and a target value reaches a fourth threshold value, the driving state including at least one of a velocity, an acceleration and a position.