US 11,754,647 B2
Magnetic sensor and magnetic sensor system
Shunji Saruki, Tokyo (JP); Hiraku Hirabayashi, Tokyo (JP); and Masanori Sakai, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Jun. 9, 2022, as Appl. No. 17/836,016.
Application 17/836,016 is a continuation of application No. 16/878,008, filed on May 19, 2020, granted, now 11,391,795.
Claims priority of application No. 2019-105074 (JP), filed on Jun. 5, 2019.
Prior Publication US 2022/0299582 A1, Sep. 22, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/098 (2013.01) [G01R 33/0017 (2013.01); G01R 33/093 (2013.01); G01R 33/096 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A magnetic sensor configured to detect a magnetic field to be detected and generate a detection value, wherein:
the magnetic field to be detected has a first direction at a reference position within a first plane, the first direction changing within a predetermined variable range within 360° in the first plane;
the magnetic sensor includes:
a substrate including a main surface forming an angle of 90° with respect to the first plane and at least one slope oblique to the main surface; and
at least one magnetoresistive element located on the at least one slope;
the at least one magnetoresistive element each includes a first magnetic layer having first magnetization that can change in direction within a corresponding second plane;
the second plane is oblique to the first plane;
the magnetic field to be detected received by each of the at least one magnetoresistive element includes an in-plane component parallel to the second plane;
the in-plane component has a second direction that changes with a change in the first direction;
the first magnetic layer is configured such that the direction of the first magnetization changes with a change in the second direction; and
the detection value depends on the direction of the first magnetization.