US 11,754,549 B2
And methods for measuring analytes using nanofabricated device
Steven Henck, Mountain View, CA (US)
Assigned to Roche Sequencing Solutions, Inc., Pleasanton, CA (US)
Filed by Roche Sequencing Solutions, Inc., Pleasanton, CA (US)
Filed on Jun. 13, 2022, as Appl. No. 17/839,085.
Application 17/839,085 is a division of application No. 15/851,608, filed on Dec. 21, 2017, granted, now 11,391,719.
Application 15/851,608 is a continuation of application No. PCT/EP2016/065155, filed on Jun. 29, 2016.
Claims priority of provisional application 62/187,161, filed on Jun. 30, 2015.
Prior Publication US 2022/0317110 A1, Oct. 6, 2022
Int. Cl. G01N 33/487 (2006.01); C12Q 1/6869 (2018.01); G01N 27/447 (2006.01)
CPC G01N 33/48721 (2013.01) [C12Q 1/6869 (2013.01); G01N 27/44791 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of making a device for sequencing a linear biomolecule using quantum tunneling, the method comprising:
providing a substrate having a top surface;
depositing a first electrode onto a first portion of the top surface of the substrate;
depositing a first dielectric layer onto a second portion of the top surface of the substrate, wherein a top surface of the first dielectric layer and a top surface of the first electrode are substantially coplanar;
depositing a sacrificial layer onto the top surface of the first electrode;
depositing a second electrode onto the sacrificial layer and onto the top surface of the first dielectric layer; and
removing the sacrificial layer, thereby forming a gap defined by the top surface of the first electrode and a bottom surface of the second electrode, wherein upon removal of the sacrificial layer:
a first portion of the second electrode is disposed on and in contact with the top surface of the first dielectric layer; and
a second portion of the second electrode is suspended over the first electrode thereby extending over the first electrode to span from a first end of the first electrode to an opposite end of the first electrode in a continuous manner.