CPC G01N 33/48721 (2013.01) [C12Q 1/6869 (2013.01); G01N 27/44791 (2013.01)] | 20 Claims |
1. A method of making a device for sequencing a linear biomolecule using quantum tunneling, the method comprising:
providing a substrate having a top surface;
depositing a first electrode onto a first portion of the top surface of the substrate;
depositing a first dielectric layer onto a second portion of the top surface of the substrate, wherein a top surface of the first dielectric layer and a top surface of the first electrode are substantially coplanar;
depositing a sacrificial layer onto the top surface of the first electrode;
depositing a second electrode onto the sacrificial layer and onto the top surface of the first dielectric layer; and
removing the sacrificial layer, thereby forming a gap defined by the top surface of the first electrode and a bottom surface of the second electrode, wherein upon removal of the sacrificial layer:
a first portion of the second electrode is disposed on and in contact with the top surface of the first dielectric layer; and
a second portion of the second electrode is suspended over the first electrode thereby extending over the first electrode to span from a first end of the first electrode to an opposite end of the first electrode in a continuous manner.
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