CPC G01J 9/00 (2013.01) [G02B 9/64 (2013.01)] | 5 Claims |
1. A system for inspecting a surface of an optical wave originating from an optical device, said optical device comprising an exit pupil, said inspection system comprising an optical measuring head and a computer for processing the images from said optical measuring head, wherein:
the optical measuring head comprises:
a density gradient filter, in a plane referenced (x′, y′) perpendicular to the optical axis of the optical measuring head, the transmission T(x′, y′) of said filter being governed by the equation:
px and py representing the periods of the two sinusoidal functions dependent respectively on (x′−y′) and (x′+y′);
a matrix frame of identical lenses of square shape and of the same focal length, said matrix frame comprising at least four lenses, each center of one of the four lenses being arranged on an axis passing through the center of the exit pupil and a point O′M′(i, j) of the density gradient filter such that, in the plane referenced (x′, y′),
i and j being able to adopt the values −1 and +1, m and n being positive integers; and
a photodetector array, each of the four lenses forming an image of the pupil in the plane of this array, these images being referenced I″k(x, y), k varying from 1 to 4; and
the image processing computer comprises computing means for computing the partial derivatives
of the wave surface Δ(x, y) in the plane (x, y) of the exit pupil, these partial derivatives being equal to
A, B and C being constants dependent on the geometric parameters of the optical measuring head.
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