US 11,754,445 B2
Interferometer element, spectrometer and method for operating an interferometer
Ralf Noltemeyer, Herrenberg (DE); Benedikt Stein, Stuttgart (DE); Christian Huber, Ludwigsburg (DE); Christoph Schelling, Stuttgart (DE); Christoph Daniel Kraemmer, Karlsruhe (DE); and Reinhold Roedel, Reutlingen (DE)
Assigned to Robert Bosch GmbH, Stuttgart (DE)
Appl. No. 17/277,642
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Oct. 22, 2019, PCT No. PCT/EP2019/078658
§ 371(c)(1), (2) Date Mar. 18, 2021,
PCT Pub. No. WO2020/083875, PCT Pub. Date Apr. 30, 2020.
Claims priority of application No. 10 2018 217 996.4 (DE), filed on Oct. 22, 2018.
Prior Publication US 2021/0356321 A1, Nov. 18, 2021
Int. Cl. G01J 3/02 (2006.01); G01J 3/26 (2006.01); G01J 3/453 (2006.01)
CPC G01J 3/027 (2013.01) [G01J 3/0229 (2013.01); G01J 3/26 (2013.01); G01J 3/4535 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An interferometer element for use in a spectrometer, comprising:
a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element, wherein
each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element,
at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable,
the first, second, and third mirror elements are supported by respective suspensions, and
each of spring tensions or spring elasticities of the respective suspensions of the first, second, and third mirror element of the micromechanical Fabry-Perot filter element differ from each of the spring tensions or spring elasticities of the other of the respective suspensions of the first, second, and third mirror element.