CPC C07F 15/065 (2013.01) [C23C 16/18 (2013.01)] | 18 Claims |
1. A cobalt complex represented by the following formula (1):
wherein L1 and L2 which are different from each other represent a unidentate amide ligand represented by the following formula (A), a bidentate amide ligand represented by the following formula (B) or a hetero atom-containing ligand represented by the following formula (C), wherein the cobalt complex is a liquid at room temperature,
wherein L1 is represented by the formula (A) or (C), and L2 is represented by the formula (B):
wherein R1 and R2 independently represent a C1-6 alkyl group or a tri(C1-6 alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;
wherein R3 represents a tri(C1-6 alkyl)silyl group, R4 and R5 independently represent a C1-4 alkyl group, and X represents a C1-6 alkylene group;
wherein R6 and R8 independently represent a C1-6 alkyl group, R7 represents a hydrogen atom or a C1-4 alkyl group, Y represents an oxygen atom or NR9, Z represents an oxygen atom or NR10, and R9 and R10 independently represent a C1-6 alkyl group.
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