US 11,753,429 B2
Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film
Hiroyuki Oike, Ayase (JP); Teppei Hayakawa, Ayase (JP); Yuki Yamamoto, Ayase (JP); Taishi Furukawa, Ayase (JP); and Ken-ichi Tada, Ayase (JP)
Assigned to TOSOH CORPORATION, Yamaguchi (JP); and SAGAMI CHEMICAL RESEARCH INSTITUTE, Kanagawa (JP)
Appl. No. 17/292,819
Filed by TOSOH CORPORATION, Shunan (JP); and SAGAMI CHEMICAL RESEARCH INSTITUTE, Ayase (JP)
PCT Filed Nov. 8, 2019, PCT No. PCT/JP2019/043979
§ 371(c)(1), (2) Date May 11, 2021,
PCT Pub. No. WO2020/100765, PCT Pub. Date May 22, 2020.
Claims priority of application No. 2018-212049 (JP), filed on Nov. 12, 2018; application No. 2019-022221 (JP), filed on Feb. 12, 2019; and application No. 2019-132379 (JP), filed on Jul. 18, 2019.
Prior Publication US 2022/0017553 A1, Jan. 20, 2022
Int. Cl. C07F 15/06 (2006.01); C23C 16/18 (2006.01)
CPC C07F 15/065 (2013.01) [C23C 16/18 (2013.01)] 18 Claims
 
1. A cobalt complex represented by the following formula (1):

OG Complex Work Unit Chemistry
wherein L1 and L2 which are different from each other represent a unidentate amide ligand represented by the following formula (A), a bidentate amide ligand represented by the following formula (B) or a hetero atom-containing ligand represented by the following formula (C), wherein the cobalt complex is a liquid at room temperature,
wherein L1 is represented by the formula (A) or (C), and L2 is represented by the formula (B):

OG Complex Work Unit Chemistry
wherein R1 and R2 independently represent a C1-6 alkyl group or a tri(C1-6 alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;

OG Complex Work Unit Chemistry
wherein R3 represents a tri(C1-6 alkyl)silyl group, R4 and R5 independently represent a C1-4 alkyl group, and X represents a C1-6 alkylene group;

OG Complex Work Unit Chemistry
wherein R6 and R8 independently represent a C1-6 alkyl group, R7 represents a hydrogen atom or a C1-4 alkyl group, Y represents an oxygen atom or NR9, Z represents an oxygen atom or NR10, and R9 and R10 independently represent a C1-6 alkyl group.