US 11,753,327 B2
RF plasma optical fiber annealing apparatuses, systems, and methods of using the same
Daniel Robert Boughton, Naples, NY (US); Kenneth Edward Hrdina, Horseheads, NY (US); Stefan Wolfgang Kramel, Ithaca, NY (US); and Christopher Scott Thomas, Horseheads, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Jun. 17, 2020, as Appl. No. 16/903,781.
Claims priority of provisional application 62/865,612, filed on Jun. 24, 2019.
Prior Publication US 2020/0399163 A1, Dec. 24, 2020
Int. Cl. C03B 37/10 (2006.01); C03B 37/029 (2006.01)
CPC C03B 37/10 (2013.01) [C03B 37/029 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of manufacturing an optical fiber, the method comprising:
heating an optical preform in a draw furnace;
drawing an optical fiber from the optical preform; and
annealing the optical fiber by passing the optical fiber through an RF inductively coupled plasma heating apparatus configured to form a cyclonic structure of plasma that tangentially heats a length of the optical fiber at a heating rate of 5,000° C. per second (° C./s) or greater as the optical fiber passes through the plasma and a cooling device configured to cool the optical fiber, the RF inductively coupled plasma heating apparatus comprises an inductor having one or more coils wrapped around a length of a plasma containment tube for containing the cyclonic structure of plasma and permitting the passage of the optical fiber through the cyclonic structure of plasma.