| US 7,589,323 B2 | ||
| Superconducting X-ray detector and X-ray analysis apparatus using the same | ||
| Keiichi Tanaka, Chiba (Japan); Akikazu Odawara, Chiba (Japan); and Satoshi Nakayama, Chiba (Japan) | ||
| Assigned to SII NanoTechnology Inc., (Japan) | ||
| Appl. No. 11/794,288 PCT Filed Jan. 24, 2006, PCT No. PCT/JP2006/300987 § 371(c)(1), (2), (4) Date Aug. 02, 2007, PCT Pub. No. WO2006/078024, PCT Pub. Date Jul. 27, 2006. |
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| Claims priority of application No. 2005-015179 (JP), filed on Jan. 24, 2005. | ||
| Prior Publication US 2007/0291902 A1, Dec. 20, 2007 | ||
| Int. Cl. H01L 27/18 (2006.01) | ||
| U.S. Cl. 250—310 [701/40; 701/132; 250/336.2] | 4 Claims |
| 1. A superconducting X-ray detector comprising:
a temperature detector comprising a superconducting multilayer thin film for detecting a temperature change by heat generated
when X-rays are absorbed, and a heat link for controlling a heat flow amount of generated heat that escapes to a support board;
wherein the superconducting X-ray detector is constituted by a structure that comprises a superconductor layer disposed above
the heat link and an insulating member disposed between the superconductor layer and the temperature detector; and
wherein the superconductor layer and the temperature detector are connected by a superconducting wiring and are constituted
by materials by which superconducting transition temperatures of the superconductor layer and the superconducting wiring are
higher than a superconducting transition temperature of the temperature detector.
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