| US 7,589,322 B2 | ||
| Sample measuring device | ||
| Kentaro Nishikata, Kyoto (Japan); Yutaka Saijo, Kyoto (Japan); Shigeru Kakinuma, Kyoto (Japan); Junichi Aoyama, Kyoto (Japan); and Satoshi Ohashi, Kyoto (Japan) | ||
| Assigned to Horiba, Ltd., Kyoto (Japan) | ||
| Filed on Jun. 28, 2006, as Appl. No. 11/477,085. | ||
| Claims priority of application No. P2005-189297 (JP), filed on Jun. 29, 2005; and application No. P2006-150952 (JP), filed on May 31, 2006. | ||
| Prior Publication US 2007/0023655 A1, Feb. 01, 2007 | ||
| Int. Cl. G01N 23/00 (2006.01) | ||
| U.S. Cl. 250—310 [250/306] | 5 Claims |
| 1. A sample measuring device that measures light generated by irradiating energy beams on a sample, comprising:
an energy beam generating part that generates energy beams,
a electron optical column part that has an energy beam control device to converge the energy beams generated by the energy
beam generating part and that converges the energy beams so as to make an axis of the energy beams coincide with an axis of
the energy beam control device by the energy beam control device, and
a light collecting mirror part that is arranged between the electron optical column part and the sample and that has an energy
beam path to pass the energy beams converged by the electron optical column part and to irradiate the energy beams on the
sample and a mirror face whose focal point is set on an axis of the energy beam path, and that collects the light generated
from the sample by the mirror face, wherein
the light collecting mirror part is supported by the electron optical column part so that the axis of the energy beams coincides
with the focal point, and is provided with a positioning structure that makes it possible to mount and dismount the electron
optical column part and the light collecting mirror part respectively, and that also makes the electron optical column part
support the light collecting mirror part so that the axis of the energy beams coincides with the focal point by positioning
an axial line of the energy beam control device and the axial line of the energy beam path coaxially.
|