US 7,587,811 B2
Method for manufacturing a magnetic write head for perpendicular magnetic data recording
Hamid Balamane, Palo Alto, Calif. (US); Christian Rene Bonhote, San Jose, Calif. (US); Yimin Hsu, Sunnyvale, Calif. (US); Aaron Neuhaus, San Jose, Calif. (US); Aron Pentek, San Jose, Calif. (US); and Yi Zheng, San Ramon, Calif. (US)
Assigned to Hitachi Global Storage Technologies Netherlands B.V., Amsterdam (Netherlands)
Filed on Apr. 25, 2006, as Appl. No. 11/411,561.
Prior Publication US 2008/0002291 A1, Jan. 03, 2008
Int. Cl. G11B 5/127 (2006.01); H04R 31/00 (2006.01)
U.S. Cl. 29—603.16  [29/603.07; 29/603.13; 29/603.14; 29/603.15; 29/603.18; 216/65; 360/121; 360/122; 360/317; 427/127; 427/128; 451/5; 451/41] 6 Claims
OG exemplary drawing
 
1. A method for manufacturing a magnetic write head for perpendicular magnetic data recording, the method comprising:
providing a substrate;
depositing an electrically conductive seed layer over the substrate;
depositing a photo resist material;
photolithographically exposing and developing the photo resist material to form an opening in the photo resist material;
depositing a chemical shrink material;
baking the photoresist material to cause a portion of the shrink material to bond with the photo resist material;
blanket exposing the photo resist to generate acid for increasing bonding between the chemical shrink material and the photo resist;
removing an un-bonded portion of the chemical shrink material leaving the portion of the chemical shrink material that has bonded to the photo resist material; and
electroplating a magnetic material into the opening in the photo resist material to from a write pole.