| US 7,424,198 B2 | ||
| Method and device for packaging a substrate | ||
| Lauren Palmateer, San Francisco, Calif. (US); William J. Cummings, San Francisco, Calif. (US); Brian Gally, San Rafael, Calif. (US); Mark Miles, San Francisco, Calif. (US); Jeffrey B. Sampsell, San Jose, Calif. (US); Clarence Chui, San Mateo, Calif. (US); and Manish Kothari, Cupertino, Calif. (US) | ||
| Assigned to IDC, LLC, San Francisco, Calif. (US) | ||
| Filed on Jan. 28, 2005, as Appl. No. 11/45,738. | ||
| Claims priority of provisional application 60/613318, filed on Sep. 27, 2004. | ||
| Prior Publication US 2006/0067641 A1, Mar. 30, 2006 | ||
| Int. Cl. G02B 6/00 (2006.01) | ||
| U.S. Cl. 385—147 [359/247] | 33 Claims |
| 1. A display device comprising an array of movable mirrors configured to interferometrically modulate light, the display device
comprising:
a transparent substrate;
an interferometric modulator comprising the array of movable mirrors, wherein said interfereometric modulator is configured
to modulate light transmitted through said transparent substrate, and
a thin film backplane sealing said array of movable mirrors within a package between said transparent substrate and said thin
film backplane, wherein a gap exists between said array of movable mirrors and said thin film backplane.
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