| US 7,587,104 B2 | ||
| MEMS device fabricated on a pre-patterned substrate | ||
| Clarence Chui, San Mateo, Calif. (US) | ||
| Assigned to IDC, LLC, Pleasanton, Calif. (US) | ||
| Filed on Apr. 16, 2008, as Appl. No. 12/104,309. | ||
| Application 12/104309 is a continuation of application No. 11/174220, filed on Jul. 01, 2005, granted, now 7,373,026. | ||
| Claims priority of provisional application 60/613376, filed on Sep. 27, 2004. | ||
| Prior Publication US 2008/0192329 A1, Aug. 14, 2008 | ||
| Int. Cl. G02F 1/29 (2006.01); G02B 26/08 (2006.01) | ||
| U.S. Cl. 385—8 [385/19; 359/224; 359/318] | 26 Claims |
| 1. A microelectromechanical systems (MEMS) device, comprising:
a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from
one another, wherein each of the trenches includes a sidewall having an upper end defining a boundary with the top surface
of the substrate;
a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at
the trenches to thereby separate the first electrode layer into a plurality of portions, wherein the plurality of portions
extend to horizontal positions of the boundaries defined by the trenches when viewed from above the substrate; and
a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity.
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