| US 7,586,317 B2 | ||
| Inspection apparatus, probe card and inspection method | ||
| Shigekazu Komatsu, Yamanashi (Japan); Dai Shinozaki, Tokyo (Japan); and Katsuaki Sakamoto, Kanagawa (Japan) | ||
| Assigned to Tokyo Electron Limited, Tokyo (Japan) | ||
| Filed on Jul. 16, 2008, as Appl. No. 12/174,014. | ||
| Claims priority of application No. 2007-189500 (JP), filed on Jul. 20, 2007. | ||
| Prior Publication US 2009/0021272 A1, Jan. 22, 2009 | ||
| Int. Cl. G01R 1/073 (2006.01) | ||
| U.S. Cl. 324—754 [324/757] | 13 Claims |
| 1. An inspection apparatus for inspecting an electrical characteristic of a target object by bringing a probe into contact
with a terminal of the target object, the apparatus comprising:
a probe pair consisting of two probes;
a plurality of fritting circuits, each having a charging/discharging unit connected to the probe pair and applying a voltage
to the probe pair by a power of the charging/discharging unit while the probe pair is in contact with the terminal of the
target object, thereby achieving an electrical connection between the probes and the terminal of the target object by using
a fritting phenomenon; and
a power supply circuit connected to the plurality of fritting circuits, for charging the charging/discharging unit of each
fritting circuit.
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