| US 7,586,260 B2 | ||
| Electron devices with non-evaporation-type getters and method for manufacturing the same | ||
| Takeshi Tonegawa, Chiba (Japan); Shigeo Itoh, Chiba (Japan); Sadanori Takayama, Chiba (Japan); Masateru Taniguchi, Chiba (Japan); Yasumoto Kubo, Chiba (Japan); Kenji Nawamaki, Chiba (Japan); Youhei Fujimura, Chiba (Japan); Mamoru Namikawa, Chiba (Japan); Yoshihisa Marushima, Chiba (Japan); Osamu Idohara, Kanagawa (Japan); Yoshiaki Inoue, Kanagawa (Japan); Seiji Yokota, Kanagawa (Japan); and Kazuhiro Kawasaki, Kanagawa (Japan) | ||
| Assigned to Futaba Corporation, Mobara-shi, Chiba-ken (Japan); and Neturen Co., Ltd., Hiratsuka-shi, Kanagawa-ken (Japan) | ||
| Filed on Feb. 21, 2006, as Appl. No. 11/358,638. | ||
| Claims priority of application No. 2005-044815 (JP), filed on Feb. 21, 2005. | ||
| Prior Publication US 2006/0197428 A1, Sep. 07, 2006 | ||
| Int. Cl. H01J 17/24 (2006.01); H01J 63/04 (2006.01); H01J 1/62 (2006.01) | ||
| U.S. Cl. 313—553 [313/498; 313/310; 313/497; 428/464; 252/181.1] | 10 Claims |
| 1. An electron device, comprising,
a hermetic envelope; and
a non-evaporation getter disposed in said hermetic envelope; said non-evaporation getter being formed of a non-evaporation
getter material selected from the group consisting of a chemical compound of Zr and a hydride of Zr; said non-evaporation
getter material having an average particle diameter of 2 μm or less, a specific surface area of 5 m2/g or more, and a flat scale-like particle form.
|