| US 7,586,218 B2 | ||
| Moving apparatus, exposure apparatus, and device manufacturing method | ||
| Hiroyuki Koide, Tochigi (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Nov. 29, 2007, as Appl. No. 11/947,024. | ||
| Application 11/167180 is a division of application No. 10/675996, filed on Oct. 02, 2003, granted, now 6,960,845. | ||
| Application 11/947024 is a continuation of application No. 11/167180, filed on Jun. 28, 2005, granted, now 7,319,283. | ||
| Claims priority of application No. 2002-295014 (JP), filed on Oct. 08, 2002. | ||
| Prior Publication US 2008/0084122 A1, Apr. 10, 2008 | ||
| Int. Cl. H02K 41/00 (2006.01) | ||
| U.S. Cl. 310—12 | 6 Claims |
| 1. A moving apparatus comprising:
a movable portion which is capable of moving;
a first actuator which has a stator, and a movable element connected to the movable portion in a first direction and drives
the movable element;
a reference structure which has a guide surface parallel to the first direction and which supports the stator so that the
stator is capable of moving along the guide surface;
a second actuator configured to drive the stator in a rotation direction around an axis which is perpendicular to the guide
surface; and
a control unit configured to control the second actuator so as to suppress the rotation of the stator accompanied by the movement
of the movable portion.
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