US 11,744,136 B2
Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
Sanghoon Kim, Yongin-si (KR); Jongsung Park, Yongin-si (KR); and Wonyoung Jang, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Nov. 19, 2020, as Appl. No. 16/953,263.
Claims priority of application No. 10-2020-0036430 (KR), filed on Mar. 25, 2020.
Prior Publication US 2021/0305542 A1, Sep. 30, 2021
Int. Cl. H01L 51/56 (2006.01); H01L 51/00 (2006.01); H10K 71/00 (2023.01); C23C 14/04 (2006.01); H10K 71/16 (2023.01); H10K 59/12 (2023.01)
CPC H10K 71/00 (2023.02) [C23C 14/042 (2013.01); H10K 59/1201 (2023.02); H10K 71/166 (2023.02); H10K 59/12 (2023.02)] 11 Claims
OG exemplary drawing
 
1. A mask assembly comprising:
a mask frame including a plurality of openings; and
a mask arranged on the mask frame and including a plurality of deposition regions and a non-opening region surrounding the plurality of deposition regions, the plurality of deposition regions facing the plurality of openings to receive a deposition material,
wherein a portion of the non-opening region disposed between each of the plurality of deposition regions has a width of about 200 μm to about 500 μm in a lengthwise direction of the mask.