CPC H03H 9/02102 (2013.01) [H03H 3/02 (2013.01); H03H 9/131 (2013.01); H03H 9/133 (2013.01); H03H 9/173 (2013.01); H03H 9/54 (2013.01); H03H 2003/021 (2013.01)] | 10 Claims |
1. A bulk acoustic resonator with a heat dissipation structure, comprising a substrate, a metal heat dissipation layer formed on the substrate and provided with an insulating layer on a surface of the metal heat dissipation layer, and a resonance function layer formed on the insulating layer, wherein the metal heat dissipation layer and the insulating layer define a cavity on the substrate, a side wall of the cavity is formed by the insulating layer, and a bottom electrode layer in the resonance function layer covers the cavity.
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